| 摘要 |
PURPOSE:To prevent contamination at a sensitive part due to release of a protection film and progress of contamination from a part other than the sensitive part by forming a protection film at a region where a sensor main body containing the sensitive part contacts a liquid to be inspected. CONSTITUTION:A probe-type liquid solution constituent sensor 31 inspects a liquid 3 to be inspected in batch system with an FET type sensor or an electrode-type sensor. A protection film 32 not only coats an ion-sensitive film 5 but also an entire contact part of the liquid to be inspected of a sensor main body 4. As a material of the protection film 32, either of collagen, segmented polyurethane, polypropyne, polyethylene, poly vinyl chloride, silicon rubber, nylon, polyester, polycarbonate, and acryl with an improved adhesion property with the sensor main body 4 which is an inorganic material is desirable and an interface treatment is performed to the sensor 4 before forming a film when adhesion property is in shortage. The liquid to be inspected does not contact those other than the protection film 32, thus preventing the main body of the sensor 4 from being contaminated or the protection film 32 from being released from an interface. |
