| 摘要 |
PURPOSE:To provide a pulse generating device for pulse laser which can protect itself from the abnormality caused by excessive voltage and low voltage at a switching circuit consisting of series-parallel circuit with high-speed switching elements. CONSTITUTION:The first comparator 33 which detects excessive voltage at a parallel circuit stage with high-speed switching elements and the second comparator 40 which detects abnormal low voltage are provided. If abnormality is detected by respective comparators 33 and 40, a high-voltage power source is stopped. Therefore, a device is protected when the parallel circuit stage is applied with an excessive voltage or a short circuit is formed due to element's breakage, etc. |
