INNER CHAMBER EXCHANGING DEVICE IN CVD DEVICE,申请号JP19910348910-传众专利搜索

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发明名称	INNER CHAMBER EXCHANGING DEVICE IN CVD DEVICE
摘要
申请公布号	JPH05160037(A)	申请公布日期	1993.06.25
申请号	JP19910348910	申请日期	1991.12.05
申请人	KOKUSAI ELECTRIC CO LTD;HITACHI LTD	发明人	MURAMATSU FUMIO;AOKI DAIYA;TAKEDA TOMOHIKO;SUZUKI MASAYUKI;ORITSUKI RYOJI
分类号	H01L21/205	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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