| 摘要 |
PURPOSE:To suppress the deterioration of the discharge of electrodes thereby to improve the reliability of a voiceless discharge type gas laser by forming one of a pair of opposed electrodes of a high voltage side electrode, the other of a low voltage side electrode, and forming the high voltage side electrode of a copper electrode and the low voltage side electrode of a dielectric electrode. CONSTITUTION:One of a pair of opposed electrodes is formed as a high voltage side electrode 8, the other is formed as a low voltage side electrode 9, the high voltage side electrode is formed of a copper electrode and the low voltage side electrode is formed of a dielectric electrode. Electrons flow in a direction from the dielectric electrode to the copper electrode. A full-wave rectified high voltage is applied between the electrodes 8 and 9 by a full-wave rectified power source 12, a silent discharge is executed between the electrodes 8 and 9, a laser medium in a discharging space 2 is excited to output a laser light. Since the dielectric material 11 is largely suppressed for the deterioration by discharging due to the condition of oxidative and has twice as large as the thickness of the conventional electrode, its life can be significantly extended to improve the reliability. |
