发明名称 PROCESSOR
摘要 PURPOSE:To efficiently apply processing liquid to the surface of a relatively large-sized rectangular body to be processed without any waste. CONSTITUTION:In this processor 2 which applies the processing liquid 10 to the surface of the rectangular body 4, a liquid storage part 8 housing the processing liquid 10 is formed so as to cover the whole of one side of the body 4 and many thin holes 14 which discharges the processing liquid 10 downward is formed along the bottom part of the storage part 8. Then a moving means 22 which moves the liquid storage part 8 in the longitudinal direction of the body 4 is provided and while the processing liquid 10 is discharged from the thin holes 14, the liquid storage part 8 is moved to apply the processing liquid 10 to the surface of the body 4 without any waste.
申请公布号 JPH05158055(A) 申请公布日期 1993.06.25
申请号 JP19910289249 申请日期 1991.10.08
申请人 TOKYO ELECTRON LTD 发明人 OMORI TSUTAE
分类号 B05C5/02;B05C5/00;B05D1/00;G02F1/13;G02F1/1343;H01L21/00;H01L21/02;H01L21/027 主分类号 B05C5/02
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