| 摘要 |
PURPOSE:To provide an illuminator for recognizing a transparent illuminating image with a small size, low costs, high reliability and no maintenance in am image recognizer for use in semiconductor processing equipment or the like. CONSTITUTION:An LED is used as a light source, and an LED lamp provided with a light scattering sheet 17 on the front plane of the LED is constructed and so located as to oppose to a recognizing camera 7 so that an object to be recognized may be interposed between the LED lamp and the recognizing camera 7. Lights derived from an LED 11 pass through the light scattering sheet 17 and become undispersed uniform ones to illuminate the object to be recognized. As the LED is fixed within a supporting tool and the light scattering sheet is fitted into a supporting tool end part, an illuminator for recognizing a transparent illuminating image with a small size, low costs and high reliability can be obtained and the regulation after arrangement is unnecessary. |
