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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH05160279(A)
申请公布日期
1993.06.25
申请号
JP19910324157
申请日期
1991.12.09
申请人
TOSHIBA CORP
发明人
ASAHI YOSHINORI
分类号
H01L21/316;H01L21/768;H01L23/522
主分类号
H01L21/316
代理机构
代理人
主权项
地址
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