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发明名称
UMGEKEHRTES DUNKELFELD-AUSRICHTSYSTEM FUER EINEN LITHOGRAPHISCHEN AUSRICHTSCANNER.
摘要
申请公布号
DE3785891(D1)
申请公布日期
1993.06.24
申请号
DE19873785891
申请日期
1987.06.24
申请人
SVG LITHOGRAPHY SYSTEMS, INC., WILTON, CONN., US
发明人
WU, FREDERICK Y., CAS COP CONNECTICUT 06807, US
分类号
G01B11/00;G03F9/00;H01L21/027;H01L21/30;H01L21/68;(IPC1-7):G03B41/00;G03F7/20
主分类号
G01B11/00
代理机构
代理人
主权项
地址
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