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发明名称
SCHLEIFMITTELZUSAMMENSETZUNG FUER SILICIUMWAFER.
摘要
申请公布号
DE68906657(D1)
申请公布日期
1993.06.24
申请号
DE19896006657
申请日期
1989.06.02
申请人
MONSANTO JAPAN LTD., TOKIO/TOKYO, JP
发明人
SASAKI, SHIGEO C/O MITSUBISHI MONSANTO CHEM. CO.,, YOKKAICHI-SHI, MIE-KEN 510, JP
分类号
C09K3/14;H01L21/304;(IPC1-7):C09K3/14
主分类号
C09K3/14
代理机构
代理人
主权项
地址
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