发明名称 Electric arc evaporator.
摘要 <p>The present invention relates to an electric arc evaporator including an anode (1), a support (2) for the part to be coated, a cathode group with a disc -shaped cathode to be evaporated (3), a current-carrier (4) and a main screen (5), that surrounds the periphery of the cathode (3). The height of the cathode (3) is inferior at least four times to its diameter, the current-carrier (4) is bucket-shaped and is in electrical contact with the non- evaporating surface of the cathode (3) and in that the cathode and the current-carrier are surrounded by an additional magnetic screen.</p>
申请公布号 EP0548032(A2) 申请公布日期 1993.06.23
申请号 EP19920830665 申请日期 1992.12.10
申请人 UNICOAT S.R.L. 发明人 BELLETTI, MANUELA
分类号 C23C14/24;C23C14/32;H01J37/32 主分类号 C23C14/24
代理机构 代理人
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