METHOD FOR DETERMINING PHYSICAL-CHEMICAL CHARACTERISTICS OF SEMICONDUCTOR,申请号SU19904787782-传众专利搜索

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发明名称	METHOD FOR DETERMINING PHYSICAL-CHEMICAL CHARACTERISTICS OF SEMICONDUCTOR
摘要
申请公布号	RU1823035(C)	申请公布日期	1993.06.23
申请号	SU19904787782	申请日期	1990.02.02
申请人	LENINGRADSKIJ GOSUDARSTVENNYJ UNIVERSITET;NAUCHNO-PROIZVODSTVENNOE OB"EDINENIE "ELEKTRON"	发明人	ANDRUSHCHENKO ALEKSANDR L;SHCHEMELEV VLADISLAV N;STUCHINSKIJ GEORGIJ B;KLIMIN ALEKSANDR I
分类号	H01L21/66	主分类号	H01L21/66
代理机构		代理人
主权项
地址

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