METHOD AND APPARATUS FOR PREFORMING CVD COATING OR PLASMA TREATMENT OF SUBSTRATE,申请号JP19920134377-传众专利搜索

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发明名称	METHOD AND APPARATUS FOR PREFORMING CVD COATING OR PLASMA TREATMENT OF SUBSTRATE
摘要
申请公布号	JPH05156450(A)	申请公布日期	1993.06.22
申请号	JP19920134377	申请日期	1992.04.28
申请人	CARL ZEISS:FA	发明人	YURUGEN OTSUTOO
分类号	C23C16/50;C23C4/00;C23C16/511;H01J37/32;H01L21/31	主分类号	C23C16/50
代理机构		代理人
主权项
地址

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