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发明名称
SUPPORT TABLE FOR PLATE-LIKE BODY AND PROCESSING APPARATUS USING THE TABLE
摘要
申请公布号
US5221403(A)
申请公布日期
1993.06.22
申请号
US19910732410
申请日期
1991.07.18
申请人
TOKYO ELECTRON LIMITED;KABUSHIKI KAISHA TOSHIBA
发明人
NOZAWA, TOSHIHISA;ARAMI, JUNICHI;HASEGAWA, ISAHIRO;OKANO, HARUO
分类号
C23C14/50;C23C14/54;C23C16/458;C23C16/509;H01J37/34;H01L21/00;H01L21/683
主分类号
C23C14/50
代理机构
代理人
主权项
地址
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