PRODUCTION OF CARBON MATERIAL

摘要

PURPOSE:To easily form a film to a larger area at a lower temp. by forming the film of prescribed raw materials under atm. pressure by a chemical vdpor growth(CVD) method. CONSTITUTION:The starting raw materials for reaction consisting of 1wt.% hydrocarbon halide having a dipole moment of gaseous or liquid state at ordinary temp. and hydrogen or the hydrocarbon halide and hydrogen as well as dilute gas as a diluting gas are introduced into a quartz reaction tube 1 from a gas introducing port 2 of the device, such as reaction tube. A filament 3 is thereafter energized to heat a substrate 4 to 400 to 1300 deg.C. The reactive gases are then thermally decomposed by contact heating and the objective carbon material contg. hexagonal diamond having a granular or thin-film shape is produced on the substrate 4.