| 摘要 |
PURPOSE:To improve the relative density by using a capsule with the inner surface formed with Cu, Co, Mo, >=1 kind of noble metal or their oxides and sintering In2O3, SnO2 and ZnO by hot isostatic pressing. CONSTITUTION:In2O3 powder, SnO2 powder and ZnO powder are mixed in a specified ratio, and the mixture is compacted by hot isostatic pressing to obtain a compact 3. Al2O3 powder 2 is placed as a pressure medium in a steel capsule 1 having the inner surface formed with Cu, Co, Ni, Mn, >=1 kind of noble metal or their oxides, and the capsule is evacuated to high vacuum and sealed. Hot isostatic pressing is then applied at 1000-1500kgf/cm<2> and 1500-2000 deg.C to obtain an In2O3-base sintered compact having >=85% relative density, and containing In2O3 whose oxygen amount is >=96% of the chemical equivalent in terms of SnO2, ZnO, and contg. 0.5-20wt.% of SnO2 and ZnO. A target is made from the sintered compact, and the target is sputtered with high efficiency. |
