发明名称 |
Method of forming microfabricated cantilever stylus with integrated pyramidal tip |
摘要 |
A dielectric cantilever arm stylus with an integrally formed pyramidal tip is provided. The tip is molded in a pyramidal pit etched in a later-removed (100) silicon substrate. An integrally-formed cantilever arm is also formed as the tip is being formed. Various thin film materials form the cantilever arm and the tip. In one embodiment of the invention, the dielectric is silicon nitride. The cantilever arm is anodically bonded to a glass block.
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申请公布号 |
US5221415(A) |
申请公布日期 |
1993.06.22 |
申请号 |
US19900618054 |
申请日期 |
1990.11.26 |
申请人 |
BOARD OF TRUSTEES OF THE LELAND STANFORD JUNIOR UNIVERSITY |
发明人 |
ALBRECHT, THOMAS R.;AKAMINE, SHINYA;CARVER, THOMAS E.;ZDEBLICK, MARK J. |
分类号 |
B81C1/00;G01Q70/10;G01Q70/14;G01Q70/16;H01L21/306 |
主分类号 |
B81C1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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