发明名称 TRANSPORT DEVICE FOR THE TRANSFER OF A WORKPIECE CARRIER
摘要 A transport device for the transfer of a workpiece carrier from a container for a first bath to a container for a second bath has a vertical sliding carriage. To this vertical sliding carriage at least one pivot arm is arranged, which carries the workpiece carrier to be transferred. The pivot range of the workpiece carrier is located exclusively below the pivot axis. By means of that a miminum possible transfer time is achieved.
申请公布号 US5221175(A) 申请公布日期 1993.06.22
申请号 US19910779799 申请日期 1991.10.21
申请人 GEBRUDER DECKER KG 发明人 SCHNYDER, HANS
分类号 B08B3/04;B23Q41/02;B65G49/04;C23G3/00;H01L21/00;H01L21/304;H01L21/677;H01L21/68 主分类号 B08B3/04
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