发明名称 PROCESS FOR THE PHOTOCHEMICAL TREATMENT OF A MATERIAL USING A FLASH TUBE LIGHT SOURCE
摘要 The process for the photochemical treatment of a solid material consists of exposing the latter to light pulses produced by at least one glow discharge elongated tube (4) having a rare gas under low pressure and whereof the gas, the pressure and the characteristics of the discharge are adapted to said material and its precursors, each pulse containing an extensive emission spectrum between 160 and 5000 nm. An electrical circuit with modulatable electrical characteristics (LC) makes it possible to modulate the discharge characteristics of the tube and the storage of the energy necessary for said discharge.
申请公布号 US5221561(A) 申请公布日期 1993.06.22
申请号 US19920861286 申请日期 1992.03.31
申请人 FRANCE TELECOM, ETABLISSEMENT AUTONOME DE DROIT PUBLIC 发明人 FLICSTEIN, JEAN;NISSIM, YVES;LICOPPE, CHRISTIAN;VITEL, YVES
分类号 C23C16/34;C23C16/44;C23C16/448;C23C16/48;H01L21/31 主分类号 C23C16/34
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