| 摘要 |
PURPOSE:To provide two operation modes: coarse positioning mode and fine positioning mode, for the position control using a piezoelectric element as a positioning actuator, select either mode according to the positioning purpose, utilize the feature of each mode, activate two operation modes in sequence, and shorten the positioning time. CONSTITUTION:A piezoelectric element 1 and a capacitor 8 electrically connectable in series to it are provided. In the coarse positioning mode, the piezoelectric element 1 and the capacitor 8 are connected in series, and position control is performed under opened-loop control. In the fine positioning mode for fine positioning, the series connection of the piezoelectric element 1 and the capacitor 8 is released, only the piezoelectric element 1 is used as an actuator, and position control is performed under closed-loop control. |
