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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH05152324(A)
申请公布日期
1993.06.18
申请号
JP19910310665
申请日期
1991.11.26
申请人
SHARP CORP
发明人
WATANABE TORU
分类号
H01L21/265;H01L21/336;H01L21/74;H01L21/76;H01L29/78
主分类号
H01L21/265
代理机构
代理人
主权项
地址
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