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发明名称
CLEANING DEVICE
摘要
申请公布号
JPH05152275(A)
申请公布日期
1993.06.18
申请号
JP19910315906
申请日期
1991.11.29
申请人
NEC YAMAGUCHI LTD
发明人
YOSHIDA HISANORI
分类号
H01L21/304
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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