发明名称 MANUFACTURING PROCESS MANAGING SYSTEM
摘要 <p>PURPOSE:To allow this manufacturing process managing system to sufficiently correspond to a various-sort/variable quantity manufacturing line by providing the system with a means for checking a process flow based upon plural inputted code information, a means for forming computer data for each plant from the checked code information, and so on. CONSTITUTION:The system has a computer 101 for describing inputted code information as process flows in manufacturing process order, variously checking the process flows, forming clean room managing data in respective processes from the checked process flow data, and transferring the formed data. The computer 101 is connected to a clean room computer 105 arranged in each plant through an LAN 103 and the computer 105 executes manufacturing process management among respective clean rooms and in respective clean rooms in accordance with the clean room managing data transferred from the computer 101.</p>
申请公布号 JPH05151231(A) 申请公布日期 1993.06.18
申请号 JP19910204402 申请日期 1991.08.14
申请人 TOSHIBA CORP 发明人 FUKUDA ETSUO;TAZAWA MASATAKA
分类号 H01L21/02;B65G61/00;G05B19/418;G06Q50/00;G06Q50/04 主分类号 H01L21/02
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