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经营范围
发明名称
SUBSTRATE PROCESSING SYSTEM
摘要
申请公布号
KR100686762(B1)
申请公布日期
2007.02.26
申请号
KR20050102709
申请日期
2005.10.31
申请人
发明人
分类号
H01L21/3065;H01L21/02
主分类号
H01L21/3065
代理机构
代理人
主权项
地址
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