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发明名称
SEMICONDUCTOR MANUFACTURING DEVICE
摘要
申请公布号
JPH05152307(A)
申请公布日期
1993.06.18
申请号
JP19910310932
申请日期
1991.11.26
申请人
KAWASAKI STEEL CORP
发明人
IKESU HARUHIKO
分类号
H01L21/324
主分类号
H01L21/324
代理机构
代理人
主权项
地址
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