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经营范围
发明名称
SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
摘要
申请公布号
JPH05152415(A)
申请公布日期
1993.06.18
申请号
JP19910342153
申请日期
1991.11.30
申请人
HITACHI LTD
发明人
NAKAI NOBUAKI;IDE HIROSHI;URAGAMI KEN
分类号
G01R31/28;H01L21/66
主分类号
G01R31/28
代理机构
代理人
主权项
地址
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