| 摘要 |
<p>PURPOSE:To provide a method for sticking a pellicle supporting frame which is stable, has no secular change and is simple for a pressure detection. CONSTITUTION:As the adhesive material 11 is used indium, lead or those alloys which are inorganic metals that do not change the quality, are flexible and have plasticity and more malleability. Thus degradation of the adhesive strength of the adhesive material 11 due to the secular change and generation of a particle due to the decomposition are prevented. Also the metals are used for detection of the adhesive pressure as the adhesive material 11. By finding a magnitude of the pressure from quantity of deformation of the adhesive material 11 using of the plasticity, a simple and cheap method for detection of the adhesive pressure is realized.</p> |
