| 摘要 |
<p>PURPOSE:To efficiently set an optimum inspection region corresponding to the kind of pellicle films and pellicle frames, and to execute inspection with high accuracy without being affected by frame stray light. CONSTITUTION:Inspection light scans a rectile 1 surface in the (x) direction and the rectile 1 is moved in the (y) direction by a transfer arm 5. At this time the light generated from the rectile 1 is received by a light receiver 4 and is subjected to photoelectric conversion. A photoelectric conversion signal is sent to a signal processing part 10 and based on the signal a foreign matter inspection is carried out. A region corresponding to optical characteristics of at least one of the pellicle film 3 and the frame 2 is set as the inspection region by a discrimination part 13 by executing scanning in the (x) direction by moving the rectile 1 up to the position where the frame stray light is received.</p> |
