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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH05152286(A)
申请公布日期
1993.06.18
申请号
JP19910314263
申请日期
1991.11.28
申请人
NIPPON PRECISION CIRCUITS KK
发明人
MORI YASUHIRO
分类号
H01L21/316;H01L21/265;H01L21/76
主分类号
H01L21/316
代理机构
代理人
主权项
地址
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