| 发明名称 |
SELF-ALIGNED PROCESS FOR NANOTUBE/NANOWIRE FETS |
| 摘要 |
a substrate comprising at least one gate region located thereon, said at least one gate region comprising a layer of at least one one-dimensional nanostructure; and a metal carbide contact located on a surface of said substrate that is aligned to an edge of said layer of at least one one-dimensional nanostructure.
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| 申请公布号 |
KR20070093085(A) |
申请公布日期 |
2007.09.17 |
| 申请号 |
KR20077015390 |
申请日期 |
2005.12.13 |
| 申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
AVOURIS PHAEDON;CARRUTHERS ROY;CHEN JIA;DETAVERNIER CHRISTOPHE;LAVOIE CHRISTIAN;WONG HON SUM PHILIP |
| 分类号 |
H01L51/00 |
主分类号 |
H01L51/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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