ELECTROSTATIC ACTUATOR AND CONTROLLING METHOD THEREOF.

摘要

An electrostatic actuator includes a sensing means for observing a position and the distribution state of electric charges without losing any special property of the actuator, and further, can be driven effectively at a high-speed. The actuator includes a first member (5) having a plurality of bank-like driving electrodes (2); a second member (6) in contact with the first member; a controlling means (9) for moving at least one of the first and second member by switching over the applied voltages of the driving electrodes to each other; sensing electrodes (4) positioned at predetermined phase intervals and isolated from the driving electrodes (2) of the first member (5); and a means for sensing the position of the second member and the distribution state of the electric charges induced thereon by sensing the electric signals induced on the sensing electrodes (4) through the distribution of the electric charge of the second member (6).