EQUIPMENT FOR NEUTRALIZING CHARGED MATERIAL.

摘要

Neutralizing equipment which can realize simply and effectively the removal of the charges on a charged body such as a wafer which is easily charged. For example, after such an easily chargeable body as a wafer (3) is transported into a case (1), if neutralizing-charge producing means which are typically light sources (8a, 8b) for projecting ultraviolet rays for exciting into the case (1) is operated, the case (1) is filled with ions which are produced by ionizing the atmosphere gas, etc. of a nonreactive gas, etc. introduced beforehand in the case (1). Hereupon, the neutralizing-charge producing means can produce positive and negative ions and electrons. When the body is charged positively, the electrons or negative ions are moved toward the charge body to neutralize the positive charges on the charged body. On the other hand, when the body is charged negatively, the positive ions produced in the case (1) are moved toward the charged body to neutralize the negative charges thereon.