发明名称 Semiconductor integrated circuit device
摘要 The bottom side of an N type silicon substrate is connected to a power supply terminal, a second P type epitaxial layer is formed on all sides of the N type silicon substrate, and a device forming portion is provided on the second P type epitaxial layer. A first P type epitaxial layer and an interlayer insulating film are provided on the device forming portion and an N well and a P well are formed on the top surface of the first P type epitaxial layer. The second P type epitaxial layer is connected to a ground terminal via the first P type epitaxial layer, the P well, a p<SUP>+</SUP> diffusion region, a via and a wire. Accordingly, a pn junction is formed at the interface between the second P type epitaxial layer and the N type silicon substrate.
申请公布号 US7288826(B2) 申请公布日期 2007.10.30
申请号 US20030688000 申请日期 2003.10.17
申请人 NEC ELECTRONICS CORPORATION 发明人 FURUMIYA MASAYUKI;OHKUBO HIROAKI;NAKASHIBA YASUTAKA
分类号 H01L27/04;H01L29/00;H01L21/761;H01L21/822;H01L21/8234;H01L27/06;H01L27/088;H01L31/109 主分类号 H01L27/04
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