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发明名称
SPIN TYPE COATING DEVICE
摘要
申请公布号
JPH05146736(A)
申请公布日期
1993.06.15
申请号
JP19910312434
申请日期
1991.11.27
申请人
SHARP CORP
发明人
OKETANI HIROI;SHIMODA RYOHEI
分类号
B05C11/08;H01L21/027;H01L21/30;H05K3/28
主分类号
B05C11/08
代理机构
代理人
主权项
地址
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