DUST-PROOF FILM

摘要

DUST-PROOF FILM A dust-proof film comprising a pellicle frame and a pellicle film spread on one side face of the frame, which is attached to a photomask, a reticle or the like to prevent a foreign substance from adhering to a pattern, wherein a paint is coated on the inner side face of the pellicle frame to form a coating layer, whereby a generation of dust from a surface of the pellicle frame is prevented.