| 摘要 |
PURPOSE:To decrease the heterogeneity generated in the film thickness of porous glass bodies. CONSTITUTION:Fuel and gaseous raw materials are supplied to a torch 13 and glass particulates are deposited on substrates 4. A turn table 16 is rotated simultaneously therewith and a torch 13 is moved back and forth and, therefore, the glass particulates from the torch 13 are uniformly supplied onto the respective substrates 4. Further, a lower heater 20 rotates relatively with the turn-table 16 and since the turn-table 16 and the respective substrates 4 are uniformly heated, the temperature of respective substrate 4 can be kept constant and the glass particulate layers deposited on the substrates 4 are formed homogeneously to a uniform thickness. The substrates 4 are thereafter heated to a high temp. within another furnace, by which the deposited glass particulate layers are made transparent and the oxide glass thin films are obtd. |
