| 摘要 |
PURPOSE:To perform speedily and accurately scratch inspection of an inspection object with such a large area as solar battery panel and hard to position the inspected body. CONSTITUTION:The reflected light of scanned light given by a light scanning mechanism 10 from a inspected body surface is received with a photo-electric converter circuit 12 and is input as an image data. The image data is once ternary-coded in a ternary encoding circuit 14. The maximum value of the ternary-coded data is replaced with minimum value to be binary-coded in a data conversion circuit 16. By detecting the end point and cross point of the binary-coded image data, the scratch is detected. For another detection method, the adjacent part of maximum of the ternary-coded data is replaced with the maximum to widen and the maximum is replaced with minimum to be binary- coded. Scratch is detected from the mean value. |
