METHOD AND APPARATUS FOR MEASURING (ELECTRIC) POTENTIAL OF SAMPLE WITH LIGHT PROBE,申请号JP19920128302-传众专利搜索

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发明名称	METHOD AND APPARATUS FOR MEASURING (ELECTRIC) POTENTIAL OF SAMPLE WITH LIGHT PROBE
摘要
申请公布号	JPH05149987(A)	申请公布日期	1993.06.15
申请号	JP19920128302	申请日期	1992.04.20
申请人	SIEMENS AG	发明人	GERARUTO ZERUKUNAA
分类号	G01R29/12;G01R19/00;G01R31/308;G02F1/03;H01L21/66	主分类号	G01R29/12
代理机构		代理人
主权项
地址

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