RESISTIVITY MEASUREMENT TRANSDUCER FOR SEMICONDUCTOR MATERIALS,申请号SU19904885319-传众专利搜索

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发明名称	RESISTIVITY MEASUREMENT TRANSDUCER FOR SEMICONDUCTOR MATERIALS
摘要
申请公布号	RU1821712(C)	申请公布日期	1993.06.15
申请号	SU19904885319	申请日期	1990.10.01
申请人	TSENTRALNYJ NAUCHNO-ISSLEDOVATELSKIJ INSTITUT IZMERITELNOJ APPARATURY;SARATOVSKIJ GOSUDARSTVENNYJ UNIVERSITET	发明人	SOLOUKHIN NIKOLAJ G;SHELUKHIN IGOR V;USANOV DMITRIJ A
分类号	G01N27/02;H01L21/66;(IPC1-7):G01N27/02	主分类号	G01N27/02
代理机构		代理人
主权项
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