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发明名称
APPARATUS FOR SUPPORTING SUBSTRATE AND APPARATUS OF PROCESSING SUBSTRATE
摘要
申请公布号
KR100825691(B1)
申请公布日期
2008.04.29
申请号
KR20000035558
申请日期
2000.06.27
申请人
发明人
分类号
G02F1/13;H01L21/68;B25J9/06;B25J15/08;G02F1/1333;G03F7/20;H01L21/027
主分类号
G02F1/13
代理机构
代理人
主权项
地址
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