| 摘要 |
<p>PURPOSE:To provide an alignment mechanism available for various substrates regardless of their shape or size, by aligning the substrate with an alignment part capable of being shrunk or enlarged according to a side wall of an air bag that is swollen or shrunk by a compressed air provided through an inlet/ discharge pipe. CONSTITUTION:In an alignment mechanism, a plurality of air bags 1, each made of an elastic body, are connected to each other through an inlet/discharge pipe 4. An outer wall of each air bag is fixedly fitted to a frame member 5. The alignment mechanism includes an alignment part 2, which is opened at a central part surrounded by an inner wall 1b of the air bag 1, and a substrate lifting means 3, which moves up and down through the central part of the alignment part 2 and slides freely for holding the substrate 6. Since the wall 1b near the center in the air bag 1 is evenly swollen or shrunk when a compressed air 7 is provided through an inlet/discharge pipe 4, the area of the alignment unit 2 is shrunk or enlarged. Then, the substrate 6 held at the substrate lifting means 3 can be aligned. In this way, various substrates can be aligned regardless of their shape or size.</p> |
