摘要 |
PURPOSE:To enable the high-speed, high-frequency region of a multi-terminal TAB-IC to be checked. CONSTITUTION:A probe card 8 is used for testing a TAB-IC composed of an IC chip connected to an insulating film on whose surface leads are formed. The probe card 8 is provided with probe pads 6 connected to the outer leads 10 of the TAB-IC, signal input/output terminals 7, and signal wires 3 controlled in specific impedance to electrically connect the probe pads 6 to the input/output terminals 7. |