发明名称 FORMATION OF THIN FILM
摘要 <p>PURPOSE:To provide the method for forming thin films used for production an image display device which reduces the coat by drastic simplification of process and has stable quality. CONSTITUTION:Overlap parts 7 of a conductive substrate holder 2 fixing a glass substrate 1 are formed long to the extent that these parts overlap on conductive electrode patterns 5 formed on the glass substrate 1 or a conductive mask is freshly added to the conductive substrate holder 2, by which the films are not deposited on the taking-out electrode part surface at the ends of the conductive electrode patterns 5 covered with the holder 2 or the mask added thereto and are selectively formed only in the regions exclusive thereof. In addition, the films are formed by electrically connecting the holder 2 or the mask added thereto and the conductive electrode patterns 5 formed on the glass substrate 1.</p>
申请公布号 JPH05142567(A) 申请公布日期 1993.06.11
申请号 JP19910302938 申请日期 1991.11.19
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 KITAMURA KAZUYOSHI;HOTTA SADAKICHI
分类号 G02F1/136;G02F1/1368;G09F9/30;H01L21/336;H01L21/68;H01L21/683;H01L29/78;H01L29/786 主分类号 G02F1/136
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