发明名称 |
FORMATION OF THIN FILM |
摘要 |
<p>PURPOSE:To provide the method for forming thin films used for production an image display device which reduces the coat by drastic simplification of process and has stable quality. CONSTITUTION:Overlap parts 7 of a conductive substrate holder 2 fixing a glass substrate 1 are formed long to the extent that these parts overlap on conductive electrode patterns 5 formed on the glass substrate 1 or a conductive mask is freshly added to the conductive substrate holder 2, by which the films are not deposited on the taking-out electrode part surface at the ends of the conductive electrode patterns 5 covered with the holder 2 or the mask added thereto and are selectively formed only in the regions exclusive thereof. In addition, the films are formed by electrically connecting the holder 2 or the mask added thereto and the conductive electrode patterns 5 formed on the glass substrate 1.</p> |
申请公布号 |
JPH05142567(A) |
申请公布日期 |
1993.06.11 |
申请号 |
JP19910302938 |
申请日期 |
1991.11.19 |
申请人 |
MATSUSHITA ELECTRIC IND CO LTD |
发明人 |
KITAMURA KAZUYOSHI;HOTTA SADAKICHI |
分类号 |
G02F1/136;G02F1/1368;G09F9/30;H01L21/336;H01L21/68;H01L21/683;H01L29/78;H01L29/786 |
主分类号 |
G02F1/136 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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