CLEANING METHOD FOR PLASMA APPARATUS,申请号JP19910328145-传众专利搜索

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发明名称	CLEANING METHOD FOR PLASMA APPARATUS
摘要
申请公布号	JPH05144743(A)	申请公布日期	1993.06.11
申请号	JP19910328145	申请日期	1991.11.15
申请人	SUMITOMO METAL IND LTD	发明人	MABUCHI HIROTSUGU
分类号	C23F4/04;H01L21/205;H01L21/302;H01L21/3065;H01L21/31;H05H1/46	主分类号	C23F4/04
代理机构		代理人
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