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发明名称
APPARATUS AND METHOD FOR HEAT TREATMENT
摘要
申请公布号
JPH05144757(A)
申请公布日期
1993.06.11
申请号
JP19910355508
申请日期
1991.11.22
申请人
SUMITOMO METAL IND LTD
发明人
INOUE MASASHI;TAKASUKA EIRYO
分类号
H01L21/22;H01L21/31
主分类号
H01L21/22
代理机构
代理人
主权项
地址
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