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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH05144917(A)
申请公布日期
1993.06.11
申请号
JP19910304602
申请日期
1991.11.20
申请人
FUJITSU LTD
发明人
ISHIGURO MASATO
分类号
H01L21/66
主分类号
H01L21/66
代理机构
代理人
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