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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH05145023(A)
申请公布日期
1993.06.11
申请号
JP19910307733
申请日期
1991.11.22
申请人
MITSUBISHI ELECTRIC CORP
发明人
UGA KIMIHARU;HONDA HIROMI;ISHIGAKI YOSHIYUKI;ISHIDA MASAHIRO
分类号
H01L27/06;H01L21/8249
主分类号
H01L27/06
代理机构
代理人
主权项
地址
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