| 摘要 |
PURPOSE:To make it possible to adjust the repeating number of a pulse laser light by minimizing the variation of luminance. CONSTITUTION:A luminance adjusting circuit 36 outputs a coolant supply amount adjusting signal 37 to a coolant supply device 25 on the basis of the temperature detecting signal 34 which is output by a temperature detector 26. Further, the amount of the coolant S to be supplied from the coolant supply device 25 to the laser tube 1 of a coolant passage 8 is varied to suppress the temperature changes in a discharging tube 3 and output a making power adjusting signal 38 to a power source 35 at the same time. Thus, the voltage of the making power from the power source 35 to a high-voltage charging circuit 2 is temporarily varied to promote suppressing the temperature changes in the discharging tube 3. Therefore, even if the repeating number is changed, it is possible to generate the laser pulses of the same luminance reliably. |
