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发明名称
PLASMA ETCHING APPARATUS
摘要
申请公布号
JPH05144773(A)
申请公布日期
1993.06.11
申请号
JP19910331269
申请日期
1991.11.19
申请人
SUMITOMO METAL IND LTD
发明人
KOMACHI KYOICHI;MABUCHI HIROTSUGU;MAEHANE YOSHIYASU;ONO KATSUYUKI
分类号
C23F4/00;H01L21/302;H01L21/3065;H05H1/46
主分类号
C23F4/00
代理机构
代理人
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