发明名称 PIEZOELECTRIC BIMORPH CANTILEVERS FOR SURFACE ANALYSIS INSTRUMENTS
摘要 In surface force apparatus and in atomic force microscopes, a free surface and an atomically sharp tip, respectively, are mounted on a cantilevered weak spring within the instrument. The present invention provides a substitute for the weak spring, in the form of a piezoelectric bimorph (10) comprising two elongate slabs of piezoelectric material, held in intimate contact at one end by a clamp (12). The bimorph is also clamped at a second location by a second clamp (14), preferably slideable on the bimorph. The second clamp is adapted to carry a supporting adaptor (15) for a free surface (20) or an atomically sharp tip. Measurement of charge developed on the bimorph due to its flexure under an applied force enables the value of the applied force to be calculated.
申请公布号 WO9311413(A1) 申请公布日期 1993.06.10
申请号 WO1992AU00640 申请日期 1992.11.26
申请人 THE AUSTRALIAN NATIONAL UNIVERSITY 发明人 PARKER, JOHN, LOUIS
分类号 G01L1/04;H01L41/09 主分类号 G01L1/04
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