发明名称 VERTICAL TYPE CURRENT SEMICONDUCTOR DEVICE UTILIZING WAFER-BONDING AND MANUFACTURE THEREOF
摘要 PURPOSE: To provide an intermediate contact layer in a title vertical current semiconductor device, such as a reinforced insulating gate bipolar transistor. CONSTITUTION: An active wafer 11, used for the formation of a device active element, is wafer/bonded onto a conductor 16 on the surface of a substrate wafer 12. By this wafer/bonding step, not only an intermediate contact layer 16 is formed but also a series of P18 and N19 region are diffused in the active wafer 11, thereby enabling an ohmic contact to be formed between the P and N-regions 18, 19 and the intermediate contact layer 16. Furthermore, a substrate wafer 12 fills the role of a supporter for the active wafer 11 in the wafer- processing work.
申请公布号 JPH05145076(A) 申请公布日期 1993.06.11
申请号 JP19920129789 申请日期 1992.04.24
申请人 MOTOROLA INC 发明人 ROBAATO II RUTSUTAA;FURANKU SETSUKO DARAGONA
分类号 H01L21/02;H01L21/20;H01L21/225;H01L21/285;H01L21/331;H01L21/336;H01L21/74;H01L29/08;H01L29/739;H01L29/78 主分类号 H01L21/02
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